鍍膜代工Coating

鉑冠PTCM1鍍膜代工線
單面濺鍍/Planner Cathode 6支

● Planner Target
● 一般金屬：Ti，Cu，Al，Ta，Co
● 貴金屬：Au，Pt，Pd，Ag
● 合金：NiCr 80:20，NiCu 40:60，SUS316，高熵合金
● 反應式濺鍍：SiO2，Si3N4，SiNO，Al2O3，TiO2，TiN，TaN
● 電鍍：Au，AuSn，Ni，Cu

 

 
鉑冠PTCM2鍍膜代工線
雙面濺鍍/Rotary Cathode 12支


● EMI Shielding
● SuS/Cu/SuS，Ti/cu

 

Coating Process Flow

Material：Cu

Planner Cathode

Rotary Cathode

Size

610*120*12mm

Thickness:12mm

Length:610mm
(Effective length:400mm)

ID54*OD76*600mm

Thickness:11mm

Length:600mm
(Effective length:450mm)

Price

10000 NTD

25000 NTD

Target utilization

 25~30%

 70~85%

Utilization formula

Utilization =
 (Initial weight – Final weight)/Initial weight  *100%

Target life

200kwh

800kwh

Average cost of target

10000 NTD/200kwh=50

25000NTD/800kwh=31.3

The cooling time while target working

none

2/3 of the time

Uniformity

U% = ±10%

U% < ±10%

Uniformity formula

Uniformity = ((max-min) / (2*Avg))*100%